How do semiconductor equipment seals cope with chemical corrosion environments?
Publish Time: 2025-02-14
When semiconductor equipment seals cope with chemical corrosion environments, a series of measures need to be taken to ensure their performance and life.1. Choose corrosion-resistant materialsRubber materials:Features: It has excellent elasticity and sealing performance, can fit the air inlet tightly, and effectively prevent external pollutants from entering the equipment. At the same time, some specific types of rubber (such as fluororubber) also have good corrosion resistance and can adapt to the chemical corrosion environment in semiconductor equipment.Application: Commonly used in parts that need to be sealed, such as the air inlet of semiconductor equipment.Metal materials:Features: It has excellent high temperature resistance and corrosion resistance, and can maintain a stable working state under harsh environments such as high temperature and high pressure.Application: It is suitable for semiconductor equipment with high requirements for sealing performance, such as reaction chambers, diffusion furnaces, etc.Plastic materials:Features: It has excellent insulation performance and corrosion resistance, and is suitable for semiconductor equipment with high requirements for electrical performance and chemical stability. At the same time, the cost of plastic seals is relatively low and easy to process.Application: It has been widely used in some common semiconductor equipment, but it is necessary to pay attention to the problem of easy deformation in high temperature environment.Silicone material:Features: It is known for its excellent high temperature resistance, oxidation resistance, ozone resistance and UV resistance, and can maintain stable performance in a wide temperature range.Application: It is particularly suitable for semiconductor equipment with demanding working environment, such as etching machines, ion implanters, etc.FFKM material:Features: A high-performance fluororubber material with excellent chemical corrosion resistance, which can resist the erosion of various strong acids, strong alkalis and organic solvents.Application: It is widely used in key parts such as chemical processing units and cleaning units of semiconductor equipment.2. Optimize the design of sealing structureAdopt a labyrinth sealing structure: By increasing the length and complexity of the sealing path, the sealing effect is improved and the direct erosion of chemical corrosive media on the seal is reduced.Design a reasonable sealing gap: Ensure that the gap between the seal and the mating part is neither too large nor too small, which can effectively prevent the leakage of chemical corrosive media and avoid excessive friction and wear.Enhance the elasticity of seals: By optimizing the material and structure of seals, improve their elasticity and recovery ability, and ensure that they can maintain good sealing performance after being exposed to chemical corrosive media for a long time.3. Strengthen maintenance and careRegularly check the status of seals: timely discover and replace aging, worn or severely corroded seals to prevent equipment failure or safety accidents caused by seal failure.Clean and lubricate the sealing parts: regularly clean the sealing parts to remove dirt and corrosion products attached to the surface of the seals, and apply an appropriate amount of lubricant to reduce friction, wear and corrosion rate.Control the working environment of the equipment: by adjusting the working environment of the equipment, such as temperature, humidity, concentration of chemical corrosive media, etc., reduce the corrosion rate of the seals and extend their service life.In summary, when semiconductor equipment seals deal with chemical corrosive environments, they need to start from multiple aspects such as material selection, structural design, maintenance, etc. to ensure that their performance and life meet the requirements of the equipment.
