In the high-temperature process of semiconductor equipment, the highest temperature that perfluoro seal can withstand varies depending on the specific type of perfluoro material. Common perfluoroether rubber (FFKM) seals are generally used at temperatures between 260℃ and 290℃, and can be intermittently used at high temperatures of 316℃. Some specially formulated or treated FFKM materials can further improve their temperature resistance, such as DuPont's Kalrez 7075 perfluoroether rubber seal, which can withstand temperatures up to 327℃.
The reason why perfluoro seals can maintain good performance at high temperatures is due to their special molecular structure. The fluorine atoms and carbon atoms in perfluoro materials form extremely stable chemical bonds, making the molecular chain less likely to break or deform at high temperatures, thereby ensuring the structural integrity and elastic recovery of the seal. This stability enables perfluoro seals to work stably for a long time in high-temperature processes in semiconductor manufacturing, such as rapid thermal processing and chemical vapor deposition, effectively preventing the leakage of process gases, chemicals, etc., and ensuring the accuracy and reliability of the process.
Taking the growth of oxide film by the ISSG process as an example, the process temperature can reach 1100℃. Although the perfluoro seal is not directly exposed to this ultra-high temperature, in the sealing environment around it, the perfluoro seal parts need to maintain good sealing performance under relatively high temperature and complex working conditions. At this time, the perfluoro seal parts can provide reliable sealing protection for semiconductor equipment with its high temperature resistance and tolerance to various chemicals and plasmas, preventing tiny particles, impurities, etc. from entering the process chamber and affecting the chip quality.
However, in actual applications, the temperature resistance limit of perfluoro seal parts will also be affected by other factors, such as sealing pressure, contact medium, and use time. Therefore, when selecting perfluoro seal parts, it is necessary to comprehensively consider various factors according to the specific high-temperature process requirements of semiconductor equipment and select appropriate perfluoro seal materials and product models to ensure the sealing effect and the normal operation of the equipment.
